The Nanoimaging and Surface Analysis lab offers semi-quantitative elemental analysis with our different X-ray analytical tools. Following are the instruments available for use depending on your needs:
Elemental Analysis
XPS and EDS Spectroscopy
- Top monolayer: ISS using Kratos Axis Ultra XPS
- Top 10 nm of the sample surface (thin film analysis): X-ray Photoelectron spectroscopy. Oxidation state of atoms are also identified through this technique
S/TEM-EDS. Sample needs to be sectioned using the Helios Nanolab. This will provide semi-quantitative elemental analysis and nanoscale elemental mapping.
- 1 – 10 μm from the surface: Energy Dispersive Spectroscopy (EDS). Analytical capability is limited to elements heavier than Beryllium (Be). Helios Nanolab 650 and Quanta 650 SEM (more suitable for large samples). This will provide semi-quantitative elemental analysis and mapping with micron resolution.
- Bulk Analysis: X-ray Fluorescence Spectroscopy (XRF). Analytical capability is limited to Na – U
- 3D elemental mapping of Sub 5 nm features:STEM /EDS tomography on the JEOL 2800
Elemental Mapping
EDS Mapping on SEM and TEM
- >2D Mapping of elemental surface oxidation ~10 μm resolution: X-ray Photoelectron Spectroscopy (XPS)
- 2D Elemental Mapping ~1 μm resolution: Energy Dispersive Spectroscopy (EDS). Analytical capability is limited to elements heavier than sodium (Be). Helios Nanolab 650 and Quanta 650 SEM.
- 2D Elemental Mapping ~1 nm resolution: Energy Dispersive Spectroscopy (EDS). Analytical capability is limited to elements heavier than sodium (Be). JEOL JEM 2800 STEM.
- 3D Elemental Mapping ~1 μm resolution: Slice and view using EDS on Helios Nanolab 650