When publishing or presenting results derived from staff and services in the Nanofab EMSAL, please use the following acknowledgement:
“This work made use of Nanofab EMSAL shared facilities of the Micron Technology Foundation Inc. Microscopy Suite sponsored by the John and Marcia Price College of Engineering, Health Sciences Center, Office of the Vice President for Research.”
If the Helios db-FIB or the JEM-2800 S/TEM are to be used in your research, please add the following to any presentations or publication acknowledgments:
“This work made use of University of Utah Nanofab shared facilities supported, in part, by the MRSEC Program of the NSF under Award No. DMR-112125.”
-
NEWS & ANNOUNCEMENTS
January 2025
Newly Installed Instrument!!!We are pleased to announce the arrival of the new MTR-3XR test frame from MicroTesting Solutions, LLC (MTSL). The test rig can perform mechanical, electrical and thermal testing procedures on samples while undergoing tensile and compression loading. Testing can be done on micro- to nano-scale features. The test rig is compatible with our Quanta SEM, Teneo SEM and the Zeiss Xradia Versa 620 micro-CT x-ray microscope, allowing for simultaneous imaging of the deformation behavior. The piezo actuator can travel up to 150 nm with a step resolution of <1 nm. The test rig stage can accommodate samples up to 8 mm in size. Load range can go up to 1.0 N (100 g) with <1uN sensitivity. We are currently in the final stage of the installation and fixing some software communication issues but we expect it to be fully functional in the next few weeks.
June 2024
New Instrument Hourly Rates Starting July 2024Dear Lab PIs
Please be advised that some of our usage rates will increase beginning July 1, 2024 according to the attached billing rate schedule. Increasing costs have affected our costs of providing service, and these rate increases will help to ensure our commitment to continue to provide the very best characterization and imaging services and instrument access to you. If you have any questions about the changes, please contact me or Amy. Thank you for your continued support. Sincerely, BrianJune 2023
SEM Short Course Returning in JulyAfter a 3-year hiatus due to the pandemic, we are pleased to announce that the Electron Microscopy and Surface Analysis Lab (EMSAL) is bringing back our Summer SEM Training Program. The Short Course will be held weekly starting the week of July 11 until August 8, 2023. It will cover training on the operation of the Quanta and Teneo SEMs with highlights of each analytical capabilities. A demo on the high-resolution Helios Nanolab 650 focused ion beam SEM is also included in the package.
Click the poster below to register:
January 2023
Newly Installed Instrument!!!We are pleased to announce the arrival of the new Zeiss Xradia Versa 620 Xray microscope in late February 2023 (tentative). This will provide 3D, sub-micron imaging resolution of hard, soft and biological materials. Materials can be studied under mechanical loads (up to 5 kN) and/or temperature conditions (-20 to 160 C). This is a truly state-of-the-art instrument that will be unique in the Intermountain West region. A broad range of transformative studies in many fields will be enabled, including: aerospace materials, semiconductor devices, additively manufactured materials, geology, biology, medicine and more. Installation is set to begin on Feb 14 and we expect the Zeiss to be available for use by late Feb.
Click here for more information or contact Dr. Brian Van Devener (801-585-6162; b.van-devener@utah.edu) Watch the Nano-Ct in action!!!October 2022
A brand-new JEOL JSM-IT200 SEM, located in the Cleanroom Metrology Bay, is now available to use. Please contact Randy Polson (randy.polson@utah.edu) to arrange a time for training on your samples. If you are already a trained SEM user on the existing EMSAL SEMs, Brian B or Joe J can train you on the new system. Researchers can access the system either through the clean conference room door (partially gowned) or the cleanroom itself (fully gowned). Click the links belor for more information https://www.jeol.co.jp/en/products/detail/JSM-IT200.html https://www.youtube.com/watch?v=dJY3um9ora8&list=PLfMDCqBR_FyfGfNfJqcDTWs45Yatp1Yhh
The Utah Nanofab will be changing our billing and reservation system beginning August 1st, 2022 You should have received an email to create an account with HSC Please watch this how-to-video for information to set up your account.
August 2022
New 24-hour Cancellation Policy on High Use Instruments (Quanta, FIB, Teneo) We now have a 24 hour cancellation policy for reservations made on the Quanta, FIB or Teneo microscopes. If you need to cancel your reservation within 24 hours of its start time, you’ll need authorization from lab staff (contact Brian, Randy or Paulo).
Surface Lab No Longer Has Caps (Cleanroom Still Does)
Starting Aug. 1st, the SAL will no longer have caps – while the Nanofab cleanroom will continue to support caps. Note that we have lowered after hours rates on instruments and continue to offer the Preliminary Seed Fund Grants to help pay for instrument and staff user fees in support of data for grant proposals.
New, Lower Off-hours Rates!!! We have new, lower, off-hours rates for academic researchers on most instruments. Click here to see the new rates. August 2021 NEWLY INSTALLED INSTRUMENTS For more information on these new tools please contact: Dr. Brian Vandevener b.van-devener@utah.edu Tel: (801)585-6162 July 2021
NEW!!! SAXSPoint 5.0 SAXS/WAXS/GISAXS Beamline
The SAXSPoint 5.0 SAXS instrument has been installed and running in the lab.
- This instrument can help you characterize size, shape and structure of your nanomaterials
- Samples can be solid, liquid, thin films, and suspensions/paste
- Environment temperature control from -150 oC to 600oC
- Atmosphere condition: vacuum, ambient air, inert gas, humidity, other reactive gases
May 2021
The FEI TENEO SEM has been installed and running in the lab. – Capabilites include ultra-high resolution imaging of nonconductive and magnetic materials – Better elemental (Z contrast) imaging for backscattered electrons using in-lens and in-column detectors – EDS analysis with new generation Octane Elite detector from Ametek – EBSD analysis with new generation Velocity Super EBSD camera from Ametek LEICA EM ACE600: A New Au/Pd coater for SEM imaging Our brand new LEICA sputter coater for SEM imaging is now installed in the SEM lab!!! – Target material include: Au/Pd, C and Ru – Can accommodate 24 12mm SEM stubs – Chamber can fit samples up to 100mm diameter – visit LEICA EM ACE600 for more info]
FEI TENEO SEM has arrived: A new high resolution low-voltage SEM for non-conducting materials -
NEWS & ANNOUNCEMENTS
January 2025
Newly Installed Instrument!!!We are pleased to announce the arrival of the new MTR-3XR test frame from MicroTesting Solutions, LLC (MTSL). The test rig can perform mechanical, electrical and thermal testing procedures on samples while undergoing tensile and compression loading. Testing can be done on micro- to nano-scale features. The test rig is compatible with our Quanta SEM, Teneo SEM and the Zeiss Xradia Versa 620 micro-CT x-ray microscope, allowing for simultaneous imaging of the deformation behavior. The piezo actuator can travel up to 150 nm with a step resolution of <1 nm. The test rig stage can accommodate samples up to 8 mm in size. Load range can go up to 1.0 N (100 g) with <1uN sensitivity. We are currently in the final stage of the installation and fixing some software communication issues but we expect it to be fully functional in the next few weeks.
June 2024
New Instrument Hourly Rates Starting July 2024Dear Lab PIs
Please be advised that some of our usage rates will increase beginning July 1, 2024 according to the attached billing rate schedule. Increasing costs have affected our costs of providing service, and these rate increases will help to ensure our commitment to continue to provide the very best characterization and imaging services and instrument access to you. If you have any questions about the changes, please contact me or Amy. Thank you for your continued support. Sincerely, BrianJune 2023
SEM Short Course Returning in JulyAfter a 3-year hiatus due to the pandemic, we are pleased to announce that the Electron Microscopy and Surface Analysis Lab (EMSAL) is bringing back our Summer SEM Training Program. The Short Course will be held weekly starting the week of July 11 until August 8, 2023. It will cover training on the operation of the Quanta and Teneo SEMs with highlights of each analytical capabilities. A demo on the high-resolution Helios Nanolab 650 focused ion beam SEM is also included in the package.
Click the poster below to register:
January 2023
Newly Installed Instrument!!!We are pleased to announce the arrival of the new Zeiss Xradia Versa 620 Xray microscope in late February 2023 (tentative). This will provide 3D, sub-micron imaging resolution of hard, soft and biological materials. Materials can be studied under mechanical loads (up to 5 kN) and/or temperature conditions (-20 to 160 C). This is a truly state-of-the-art instrument that will be unique in the Intermountain West region. A broad range of transformative studies in many fields will be enabled, including: aerospace materials, semiconductor devices, additively manufactured materials, geology, biology, medicine and more. Installation is set to begin on Feb 14 and we expect the Zeiss to be available for use by late Feb.
Click here for more information or contact Dr. Brian Van Devener (801-585-6162; b.van-devener@utah.edu) Watch the Nano-Ct in action!!!October 2022
A brand-new JEOL JSM-IT200 SEM, located in the Cleanroom Metrology Bay, is now available to use. Please contact Randy Polson (randy.polson@utah.edu) to arrange a time for training on your samples. If you are already a trained SEM user on the existing EMSAL SEMs, Brian B or Joe J can train you on the new system. Researchers can access the system either through the clean conference room door (partially gowned) or the cleanroom itself (fully gowned). Click the links belor for more information https://www.jeol.co.jp/en/products/detail/JSM-IT200.html https://www.youtube.com/watch?v=dJY3um9ora8&list=PLfMDCqBR_FyfGfNfJqcDTWs45Yatp1Yhh
The Utah Nanofab will be changing our billing and reservation system beginning August 1st, 2022 You should have received an email to create an account with HSC Please watch this how-to-video for information to set up your account.
August 2022
New 24-hour Cancellation Policy on High Use Instruments (Quanta, FIB, Teneo) We now have a 24 hour cancellation policy for reservations made on the Quanta, FIB or Teneo microscopes. If you need to cancel your reservation within 24 hours of its start time, you’ll need authorization from lab staff (contact Brian, Randy or Paulo).
Surface Lab No Longer Has Caps (Cleanroom Still Does)
Starting Aug. 1st, the SAL will no longer have caps – while the Nanofab cleanroom will continue to support caps. Note that we have lowered after hours rates on instruments and continue to offer the Preliminary Seed Fund Grants to help pay for instrument and staff user fees in support of data for grant proposals.
New, Lower Off-hours Rates!!! We have new, lower, off-hours rates for academic researchers on most instruments. Click here to see the new rates. August 2021 NEWLY INSTALLED INSTRUMENTS For more information on these new tools please contact: Dr. Brian Vandevener b.van-devener@utah.edu Tel: (801)585-6162 July 2021
NEW!!! SAXSPoint 5.0 SAXS/WAXS/GISAXS Beamline
The SAXSPoint 5.0 SAXS instrument has been installed and running in the lab.
- This instrument can help you characterize size, shape and structure of your nanomaterials
- Samples can be solid, liquid, thin films, and suspensions/paste
- Environment temperature control from -150 oC to 600oC
- Atmosphere condition: vacuum, ambient air, inert gas, humidity, other reactive gases
May 2021
The FEI TENEO SEM has been installed and running in the lab. – Capabilites include ultra-high resolution imaging of nonconductive and magnetic materials – Better elemental (Z contrast) imaging for backscattered electrons using in-lens and in-column detectors – EDS analysis with new generation Octane Elite detector from Ametek – EBSD analysis with new generation Velocity Super EBSD camera from Ametek LEICA EM ACE600: A New Au/Pd coater for SEM imaging Our brand new LEICA sputter coater for SEM imaging is now installed in the SEM lab!!! – Target material include: Au/Pd, C and Ru – Can accommodate 24 12mm SEM stubs – Chamber can fit samples up to 100mm diameter – visit LEICA EM ACE600 for more info]
FEI TENEO SEM has arrived: A new high resolution low-voltage SEM for non-conducting materials -
NEWS & ANNOUNCEMENTS
January 2025
Newly Installed Instrument!!!We are pleased to announce the arrival of the new MTR-3XR test frame from MicroTesting Solutions, LLC (MTSL). The test rig can perform mechanical, electrical and thermal testing procedures on samples while undergoing tensile and compression loading. Testing can be done on micro- to nano-scale features. The test rig is compatible with our Quanta SEM, Teneo SEM and the Zeiss Xradia Versa 620 micro-CT x-ray microscope, allowing for simultaneous imaging of the deformation behavior. The piezo actuator can travel up to 150 nm with a step resolution of <1 nm. The test rig stage can accommodate samples up to 8 mm in size. Load range can go up to 1.0 N (100 g) with <1uN sensitivity. We are currently in the final stage of the installation and fixing some software communication issues but we expect it to be fully functional in the next few weeks.
June 2024
New Instrument Hourly Rates Starting July 2024Dear Lab PIs
Please be advised that some of our usage rates will increase beginning July 1, 2024 according to the attached billing rate schedule. Increasing costs have affected our costs of providing service, and these rate increases will help to ensure our commitment to continue to provide the very best characterization and imaging services and instrument access to you. If you have any questions about the changes, please contact me or Amy. Thank you for your continued support. Sincerely, BrianJune 2023
SEM Short Course Returning in JulyAfter a 3-year hiatus due to the pandemic, we are pleased to announce that the Electron Microscopy and Surface Analysis Lab (EMSAL) is bringing back our Summer SEM Training Program. The Short Course will be held weekly starting the week of July 11 until August 8, 2023. It will cover training on the operation of the Quanta and Teneo SEMs with highlights of each analytical capabilities. A demo on the high-resolution Helios Nanolab 650 focused ion beam SEM is also included in the package.
Click the poster below to register:
January 2023
Newly Installed Instrument!!!We are pleased to announce the arrival of the new Zeiss Xradia Versa 620 Xray microscope in late February 2023 (tentative). This will provide 3D, sub-micron imaging resolution of hard, soft and biological materials. Materials can be studied under mechanical loads (up to 5 kN) and/or temperature conditions (-20 to 160 C). This is a truly state-of-the-art instrument that will be unique in the Intermountain West region. A broad range of transformative studies in many fields will be enabled, including: aerospace materials, semiconductor devices, additively manufactured materials, geology, biology, medicine and more. Installation is set to begin on Feb 14 and we expect the Zeiss to be available for use by late Feb.
Click here for more information or contact Dr. Brian Van Devener (801-585-6162; b.van-devener@utah.edu) Watch the Nano-Ct in action!!!October 2022
A brand-new JEOL JSM-IT200 SEM, located in the Cleanroom Metrology Bay, is now available to use. Please contact Randy Polson (randy.polson@utah.edu) to arrange a time for training on your samples. If you are already a trained SEM user on the existing EMSAL SEMs, Brian B or Joe J can train you on the new system. Researchers can access the system either through the clean conference room door (partially gowned) or the cleanroom itself (fully gowned). Click the links belor for more information https://www.jeol.co.jp/en/products/detail/JSM-IT200.html https://www.youtube.com/watch?v=dJY3um9ora8&list=PLfMDCqBR_FyfGfNfJqcDTWs45Yatp1Yhh
The Utah Nanofab will be changing our billing and reservation system beginning August 1st, 2022 You should have received an email to create an account with HSC Please watch this how-to-video for information to set up your account.
August 2022
New 24-hour Cancellation Policy on High Use Instruments (Quanta, FIB, Teneo) We now have a 24 hour cancellation policy for reservations made on the Quanta, FIB or Teneo microscopes. If you need to cancel your reservation within 24 hours of its start time, you’ll need authorization from lab staff (contact Brian, Randy or Paulo).
Surface Lab No Longer Has Caps (Cleanroom Still Does)
Starting Aug. 1st, the SAL will no longer have caps – while the Nanofab cleanroom will continue to support caps. Note that we have lowered after hours rates on instruments and continue to offer the Preliminary Seed Fund Grants to help pay for instrument and staff user fees in support of data for grant proposals.
New, Lower Off-hours Rates!!! We have new, lower, off-hours rates for academic researchers on most instruments. Click here to see the new rates. August 2021 NEWLY INSTALLED INSTRUMENTS For more information on these new tools please contact: Dr. Brian Vandevener b.van-devener@utah.edu Tel: (801)585-6162 July 2021
NEW!!! SAXSPoint 5.0 SAXS/WAXS/GISAXS Beamline
The SAXSPoint 5.0 SAXS instrument has been installed and running in the lab.
- This instrument can help you characterize size, shape and structure of your nanomaterials
- Samples can be solid, liquid, thin films, and suspensions/paste
- Environment temperature control from -150 oC to 600oC
- Atmosphere condition: vacuum, ambient air, inert gas, humidity, other reactive gases
May 2021
The FEI TENEO SEM has been installed and running in the lab. – Capabilites include ultra-high resolution imaging of nonconductive and magnetic materials – Better elemental (Z contrast) imaging for backscattered electrons using in-lens and in-column detectors – EDS analysis with new generation Octane Elite detector from Ametek – EBSD analysis with new generation Velocity Super EBSD camera from Ametek LEICA EM ACE600: A New Au/Pd coater for SEM imaging Our brand new LEICA sputter coater for SEM imaging is now installed in the SEM lab!!! – Target material include: Au/Pd, C and Ru – Can accommodate 24 12mm SEM stubs – Chamber can fit samples up to 100mm diameter – visit LEICA EM ACE600 for more info]
FEI TENEO SEM has arrived: A new high resolution low-voltage SEM for non-conducting materials -
NEWS & ANNOUNCEMENTS
January 2025
Newly Installed Instrument!!!We are pleased to announce the arrival of the new MTR-3XR test frame from MicroTesting Solutions, LLC (MTSL). The test rig can perform mechanical, electrical and thermal testing procedures on samples while undergoing tensile and compression loading. Testing can be done on micro- to nano-scale features. The test rig is compatible with our Quanta SEM, Teneo SEM and the Zeiss Xradia Versa 620 micro-CT x-ray microscope, allowing for simultaneous imaging of the deformation behavior. The piezo actuator can travel up to 150 nm with a step resolution of <1 nm. The test rig stage can accommodate samples up to 8 mm in size. Load range can go up to 1.0 N (100 g) with <1uN sensitivity. We are currently in the final stage of the installation and fixing some software communication issues but we expect it to be fully functional in the next few weeks.
June 2024
New Instrument Hourly Rates Starting July 2024Dear Lab PIs
Please be advised that some of our usage rates will increase beginning July 1, 2024 according to the attached billing rate schedule. Increasing costs have affected our costs of providing service, and these rate increases will help to ensure our commitment to continue to provide the very best characterization and imaging services and instrument access to you. If you have any questions about the changes, please contact me or Amy. Thank you for your continued support. Sincerely, BrianJune 2023
SEM Short Course Returning in JulyAfter a 3-year hiatus due to the pandemic, we are pleased to announce that the Electron Microscopy and Surface Analysis Lab (EMSAL) is bringing back our Summer SEM Training Program. The Short Course will be held weekly starting the week of July 11 until August 8, 2023. It will cover training on the operation of the Quanta and Teneo SEMs with highlights of each analytical capabilities. A demo on the high-resolution Helios Nanolab 650 focused ion beam SEM is also included in the package.
Click the poster below to register:
January 2023
Newly Installed Instrument!!!We are pleased to announce the arrival of the new Zeiss Xradia Versa 620 Xray microscope in late February 2023 (tentative). This will provide 3D, sub-micron imaging resolution of hard, soft and biological materials. Materials can be studied under mechanical loads (up to 5 kN) and/or temperature conditions (-20 to 160 C). This is a truly state-of-the-art instrument that will be unique in the Intermountain West region. A broad range of transformative studies in many fields will be enabled, including: aerospace materials, semiconductor devices, additively manufactured materials, geology, biology, medicine and more. Installation is set to begin on Feb 14 and we expect the Zeiss to be available for use by late Feb.
Click here for more information or contact Dr. Brian Van Devener (801-585-6162; b.van-devener@utah.edu) Watch the Nano-Ct in action!!!October 2022
A brand-new JEOL JSM-IT200 SEM, located in the Cleanroom Metrology Bay, is now available to use. Please contact Randy Polson (randy.polson@utah.edu) to arrange a time for training on your samples. If you are already a trained SEM user on the existing EMSAL SEMs, Brian B or Joe J can train you on the new system. Researchers can access the system either through the clean conference room door (partially gowned) or the cleanroom itself (fully gowned). Click the links belor for more information https://www.jeol.co.jp/en/products/detail/JSM-IT200.html https://www.youtube.com/watch?v=dJY3um9ora8&list=PLfMDCqBR_FyfGfNfJqcDTWs45Yatp1Yhh
The Utah Nanofab will be changing our billing and reservation system beginning August 1st, 2022 You should have received an email to create an account with HSC Please watch this how-to-video for information to set up your account.
August 2022
New 24-hour Cancellation Policy on High Use Instruments (Quanta, FIB, Teneo) We now have a 24 hour cancellation policy for reservations made on the Quanta, FIB or Teneo microscopes. If you need to cancel your reservation within 24 hours of its start time, you’ll need authorization from lab staff (contact Brian, Randy or Paulo).
Surface Lab No Longer Has Caps (Cleanroom Still Does)
Starting Aug. 1st, the SAL will no longer have caps – while the Nanofab cleanroom will continue to support caps. Note that we have lowered after hours rates on instruments and continue to offer the Preliminary Seed Fund Grants to help pay for instrument and staff user fees in support of data for grant proposals.
New, Lower Off-hours Rates!!! We have new, lower, off-hours rates for academic researchers on most instruments. Click here to see the new rates. August 2021 NEWLY INSTALLED INSTRUMENTS For more information on these new tools please contact: Dr. Brian Vandevener b.van-devener@utah.edu Tel: (801)585-6162 July 2021
NEW!!! SAXSPoint 5.0 SAXS/WAXS/GISAXS Beamline
The SAXSPoint 5.0 SAXS instrument has been installed and running in the lab.
- This instrument can help you characterize size, shape and structure of your nanomaterials
- Samples can be solid, liquid, thin films, and suspensions/paste
- Environment temperature control from -150 oC to 600oC
- Atmosphere condition: vacuum, ambient air, inert gas, humidity, other reactive gases
May 2021
The FEI TENEO SEM has been installed and running in the lab. – Capabilites include ultra-high resolution imaging of nonconductive and magnetic materials – Better elemental (Z contrast) imaging for backscattered electrons using in-lens and in-column detectors – EDS analysis with new generation Octane Elite detector from Ametek – EBSD analysis with new generation Velocity Super EBSD camera from Ametek LEICA EM ACE600: A New Au/Pd coater for SEM imaging Our brand new LEICA sputter coater for SEM imaging is now installed in the SEM lab!!! – Target material include: Au/Pd, C and Ru – Can accommodate 24 12mm SEM stubs – Chamber can fit samples up to 100mm diameter – visit LEICA EM ACE600 for more info]
FEI TENEO SEM has arrived: A new high resolution low-voltage SEM for non-conducting materials
A University of Utah Core Facility
University of Utah Faculty and Researchers
Other Universities and Government Labs
Private companies and Industries
Industries
Advanced Materials
Aerospace
Alternative Energy
Automotives & Robotics
Composite Materials
Environmental Science
Medical and Dental Devices
Microelectronics
Mining & Drilling
Nanomaterials and Nanoparticulate Research
Pharmaceuticals
Personalized Medicine
Semiconductor Manufacturing
Strategic Defense
Capabilites
Multi-scale Correlative Analytical Microscopy (Optical and SEM imaging)
Imaging from cm to nm scale
Elemental and Chemical analysis
Environmental (in-situ) imaging from nm - um scale (liquid phase, gas phase, electrochemistry)
3D topographic and tomographic imaging
Thin film characterization, morphology, preferred grain orientation, microstructure, thickness, n&k, hardness, elasticity
Full suite of sample prep tools: cutting, polishing, ion milling, sputter coating