Different instruments are offered by the Nanoscale imaging and Surface Analysis lab for metrology depending on the dimensional scale of the desired measurement.
HYSITRON TI PREMIER NANOINDENTER
- Measure Young’s modulus, hardness, fracture toughness and other mechanical properties
- Identify topographical features
- perform tests with highly-accurate positioning and placement of scan tip
- Acquire information about the deformation in post-scanning
- Measure quantitative RMS Surface Roughness
OLYMPUS LEXT OLS5000
- Non-contact, 3D, surface metrology at~10 nm resolution (z)
- Wide range of objectives: 5x, 10x, 20x (SLWD),50x (LWD), 100x
- Surface roughness, surface area, line profile,film thickness, step height measurements and more
- Automated report generation feature
- True, quantitative 3D imaging
- High aspect ratio structure measurements:measure surface features at up to 87° with respect to the light source
- Two imaging modes: 3D image + true color optical microscope image
BRUKER DIMENSION ICON AFM
- High-resolution imaging and measurement of surface height features at angstrom scales
- Quantitative measurement of sub-nanometer scale surface roughness
- Easy instrument operation with the use of Bruker ScanAsyst™ and PeakForce™ tapping modes
- Contact and tapping imaging modes
- Magnetic force microscopy
- Fluid cell imaging for biological samples
- Special deep trench probe for high aspect ratio surface features