| Atomic Force Microscope (AFM): Bruker Dimension Icon |
| Ellipsometer: Woollam Variable Angle Scanning Ellipsometer (VASE) |
| Focused Ion Beam (FIB) Scanning Electron Microscope (SEM): FEI Helios Nanolab 650 |
| Laser Confocal Microscope: Olympus LEXT OLS5000 |
| Nanoindenter: Hysitron TI Premier |
| Optical Comparator: Vertex 220 |
| Optical Profiler: Zygo NewView5000 |
| Scanning Electron Microscope (SEM): FEI Quanta 600FEG |
| Scanning Transmission Electron Microscope (STEM): JEOL 2800 |
| X-ray Fluorescence Spectrometer (XRF): Eagle III Microspot |
| X-ray Photoelectron Spectrophotometer (XPS): Kratos Axis Ultra |